Plasma-resistant perfluoro elastomer
TOMBO™ No. 2670-PFW
Rubber O-ring Perfluoro PFW
It has excellent plasma resistance and is used in dry etching equipment to manufacture semiconductors.
Product Category
Elastomer ProductsHigh-Performance Elastomer
Industry
ElectronicsSemiconductors & Flat Panel Displays (FPD)Electronic Components
Forte
Standard hardness (Duro A): 70
It experiences little weight reduction when exposed to plasma and has excellent plasma resistance.
*The guide for heat resistance differs according to various conditions.
Application
Other
- TOMBO is a registered trademark or trademark of NICHIAS Corporation.
- Name of products with "®" are registered trademarks of NICHIAS Corporation.
- Name of products with "™" are trademarks of NICHIAS Corporation.
Download Catalogs
SDS（製品安全データシート）Chemical-resistant perfluoro elastomer
BLAZER™ O-ring-A
TOMBO™ No. 2675-ASteam-resistant perfluoro elastomer
BLAZER™ O-ring-S2
TOMBO™ No. 2675-S2Heat and chemical-resistant perfluoro elastomer
Rubber O-ring BLAZER NEXT™
TOMBO™ No. 2670-BNXPlasma-resistant special fluoro elastomer
