Chemical filter
TOMBO™ No. 8803-HC/-HA/-HT
CHEMICAL GUARD
It is a filter that removes low-concentration gas (ammonia and acidic and organic gases), making it suitable for the likes of clean rooms and semiconductor manufacturing equipment. By applying Nichias’ exclusive honeycomb manufacturing technologies and having a large amount of adsorbent/functional material inside the wall, it can remove ultra-low-concentration (a few μg/m3) gas components with high efficiency.
Product Category
Filter-Related ProductsFilter Products
Industry
ElectronicsSemiconductors & Flat Panel Displays (FPD)Electronic ComponentsVarious Plant FacilitiesClean rooms
Forte
Type
Chemical filter for removing basic gases
Ammonia, trimethylamine, etc.
TOMBO No.8803-HA
Chemical filter for removing acid gases
SOx, NOx, Cl, etc.
TOMBO No.8803-HT
Chemical filter for removing organic gases
Organic matter with a high boiling point such as DOP, DEP, and siloxane
Other
- TOMBO is a registered trademark or trademark of NICHIAS Corporation.
- Name of products with "®" are registered trademarks of NICHIAS Corporation.
- Name of products with "™" are trademarks of NICHIAS Corporation.
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